High-resolution micromachined interferometric accelerometer

Sub-10 cm Interferometric Accelerometer With Nano-g Resolution

A high-resolution accelerometer with a bulk-micromachined silicon proof mass and an interferometric position sensor was developed for measuring vibratory accelerations. The interferometer consists of interdigitated fingers that are alternately attached to the proof mass and support substrate. Illuminating the fingers with coherent light generates a series of diffracted beams. The intensity of a...

Design and Demonstration of a Bulk Micromachined Fabry–Pérot g-Resolution Accelerometer

A high resolution, passive, bulk-micromachined accelerometer based on the transmission-type intrinsic Fabry–Pérot interferometer has been designed, fabricated and, for the first time, experimentally evaluated via direct inertial characterization. The device characterization includes frequencyand time-domain evaluation. The sensor characteristics of bandwidth, range, sensitivity, and resolution ...

High-resolution continuous-time interface for micromachined capacitive accelerometer

AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION

A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.

Control Strategy for Measurement Performance Enhancement of a Micromachined Accelerometer

This paper presents the design of a closed-loop micromachined accelerometer using a sensitivity functions shaping approach in order to reach the desired measurement performance. The controller design is based on an identified model of the plant (MEMS, readout circuit and actuator) and a pole placement strategy. Simulation results and real-time application on a prototype show the feasibility and...